Handbook of Optical Dimensional MetrologyHandbook of Optical Dimensional Metrology



Handbook of Optical Dimensional Metrology provides useful background information and practical examples to help readers understand and effectively use state-of-the-art optical metrology methods

Author: Kevin Harding

Publisher: Taylor & Francis

ISBN: 9781439854822

Category:

Page: 506

View: 197

Due to their speed, data density, and versatility, optical metrology tools play important roles in today’s high-speed industrial manufacturing applications. Handbook of Optical Dimensional Metrology provides useful background information and practical examples to help readers understand and effectively use state-of-the-art optical metrology methods. The book first builds a foundation for evaluating optical measurement methods. It explores the many terms of optical metrology and compares it to other forms of metrology, such as mechanical gaging, highlighting the limitations and errors associated with each mode of measurement at a general level. This comparison is particularly helpful to current industry users who operate the most widely applied mechanical tools. The book then focuses on each application area of measurement, working down from large area to medium-sized to submicron measurements. It describes the measurement of large objects on the scale of buildings, the measurement of durable manufactured goods such as aircraft engines and appliances, and the measurement of fine features on the micron and nanometer scales. In each area, the book covers fast, coarse measures as well as the finest measurements possible. Best practices and practical examples for each technology aid readers in effectively using the methods. Requiring no prior expertise in optical dimensional metrology, this handbook helps engineers and quality specialists understand the capabilities and limitations of optical metrology methods. It also shows them how to successfully apply optical metrology to a vast array of current engineering and scientific problems.

Handbook of Optical MetrologyHandbook of Optical Metrology



Designed to provide beginners with an introduction to optical metrology without sacrificing academic rigor, this comprehensive text: Covers fundamentals of light sources, lenses, prisms, and mirrors, as well as optoelectronic sensors, ...

Author: Toru Yoshizawa

Publisher: CRC Press

ISBN: 9781351831840

Category:

Page: 919

View: 292

Handbook of Optical Metrology: Principles and Applications begins by discussing key principles and techniques before exploring practical applications of optical metrology. Designed to provide beginners with an introduction to optical metrology without sacrificing academic rigor, this comprehensive text: Covers fundamentals of light sources, lenses, prisms, and mirrors, as well as optoelectronic sensors, optical devices, and optomechanical elements Addresses interferometry, holography, and speckle methods and applications Explains Moiré metrology and the optical heterodyne measurement method Delves into the specifics of diffraction, scattering, polarization, and near-field optics Considers applications for measuring length and size, displacement, straightness and parallelism, flatness, and three-dimensional shapes This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters—nearly 100 pages—on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video measurement, and optical metrology in manufacturing technology.

Handbook of Dimensional MeasurementHandbook of Dimensional Measurement



The Third Edition of this classic book has been completely revised to include the computer and electronics revolution in metrology.

Author: Francis T. Farago

Publisher: Industrial Press Inc.

ISBN: 0831130539

Category:

Page: 580

View: 521

Nineteen Fact-Filled Charters that contain authoritative treatment of all aspects of dimensional measurement technology make Handbook of Dimensional Measurement the most readable and comprehensive guide available for engineers and technicians engages in the various stages of industrial production. Design engineers, manufacturing engineers, tool and gage makers, quality control specialists, and reliability experts will find a wealth of practical data as well as complete coverage - both basic and advanced - of dimensional measurement techniques and equipment. The Third Edition of this classic book has been completely revised to include the computer and electronics revolution in metrology. Virtually every type of measurement instrument and machine, even the newest devices, can be found in these pages. Hundreds of changes, and additions and scores of new illustrations have been incorporated to assure that Handbook of Dimensional Measurement retains its status as the standard reference for the practitioner of dimensional measurement.

Handbook of 3D Machine VisionHandbook of 3D Machine Vision



Yet choosing from the numerous 3D vision methods available can be frustrating for scientists and engineers, especially without a comprehensive resource to consult. Filling this gap, Handbook of 3D Machine Vision: Optical Metro

Author: Song Zhang

Publisher: Taylor & Francis

ISBN: 9781439872208

Category:

Page: 414

View: 664

With the ongoing release of 3D movies and the emergence of 3D TVs, 3D imaging technologies have penetrated our daily lives. Yet choosing from the numerous 3D vision methods available can be frustrating for scientists and engineers, especially without a comprehensive resource to consult. Filling this gap, Handbook of 3D Machine Vision: Optical Metro

Handbook of Optical Systems Metrology of Optical Components and SystemsHandbook of Optical Systems Metrology of Optical Components and Systems



In this Volume Volume 5 topics comprise the methods of measuring the properties of optical systems. The different fundamental techniques, such as propagation measurement and polarimetry, are introduced and discussed in detail and clarity.

Author: Bernd Dörband

Publisher: John Wiley & Sons

ISBN: 9783527403813

Category:

Page: 1004

View: 848

Optical systems have a wide range of technical applications (e.g. viewing devices, lens systems) and uses in industrial manufacturing. And while the design of optical systems requires a high level of expertise, there is, to date, no resource available, which allows beginners to learn optical design. This state-of-the-art handbook, written by reputed industrial experts, provides a comprehensive introduction to designing optical systems, combining for the first time theoretical aspects of optical modeling with applications of practical optical design. With more than 3,000 full-colored illustrations and images, here is an essential reference for the optical industry as well as universities of applied sciences.

Handbook of Silicon Semiconductor MetrologyHandbook of Silicon Semiconductor Metrology



Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods.

Author: Alain C. Diebold

Publisher: CRC Press

ISBN: 9780203904541

Category:

Page: 896

View: 902

Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay

Handbook of Solid State Lighting and LEDsHandbook of Solid State Lighting and LEDs



OPTICS. AND. OPTOELECTRONICS. Series Editors: E Roy Pike, Kings College,
London, UK Robert G W Brown, ... of 3D Machine Vision: Optical Metrology and
Imaging Song Zhang (Ed.) Handbook of Optical Dimensional Metrology Kevin ...

Author: Zhe Chuan Feng

Publisher: CRC Press

ISBN: 9781351647649

Category:

Page: 704

View: 350

This handbook addresses the development of energy-efficient, environmentally friendly solid-state light sources, in particular semiconductor light emitting diodes (LEDs) and other solid-state lighting devices. It reflects the vast growth of this field and impacts in diverse industries, from lighting to communications, biotechnology, imaging, and medicine. The chapters include coverage of nanoscale processing, fabrication of LEDs, light diodes, photodetectors and nanodevices, characterization techniques, application, and recent advances. Readers will obtain an understanding of the key properties of solid-state lighting and LED devices, an overview of current technologies, and appreciation for the challenges remaining. The handbook will be useful to material growers and evaluators, device design and processing engineers, newcomers, students, and professionals in the field.

Handbook of Dimensional MeasurementHandbook of Dimensional Measurement



While the elements of the bar system provide a reasonable degree of tracking
accuracy , the measurements by optical tooling are controlled by inherent
targeting , aligning , leveling and squaring capabilities of the sighting instruments
.

Author: Mark A. Curtis

Publisher: Industrial Press Inc.

ISBN: PSU:000061035034

Category:

Page: 583

View: 659

Providing comprehensive, state-of-the-art treatment of all known dimensional measurement devices and techniques, this unique and updated resource is organized into chapters by gage type and function, while individual chapters move from simple to complex, as well as from timeless measurement techniques to the most modern and innovative.

Three dimensional Imaging Optical Metrology and Inspection VThree dimensional Imaging Optical Metrology and Inspection V



ACKNOWLEDGMENTS This study was supposed in part by National Science
Council Taiwan , R.O.C. , under contract NSC - 87-2215 - E - 231-002 .
REFERENCES 1. E. D. Palik , Handbook of optical constants of solids , (
Academic Press .

Author: Society of Photo-optical Instrumentation Engineers

Publisher: Society of Photo Optical

ISBN: STANFORD:36105021835926

Category:

Page: 224

View: 209

This work presents a series of papers examining various aspects of three-dimensional imaging, optical metrology and inspection.

Handbook of Optical Systems Volume 2Handbook of Optical Systems Volume 2



In this Volume Volume 2 continues the introduction given in volume 1 with the more advanced texts about the foundations of image formation. Emphasis is placed on an intuitive while theoretically exact presentation.

Author: Wolfgang Singer

Publisher: John Wiley & Sons

ISBN: 9783527606924

Category:

Page: 714

View: 475

The state-of-the-art full-colored handbook gives a comprehensive introduction to the principles and the practice of calculation, layout, and understanding of optical systems and lens design. Written by reputed industrial experts in the field, this text introduces the user to the basic properties of optical systems, aberration theory, classification and characterization of systems, advanced simulation models, measuring of system quality and manufacturing issues. In this Volume Volume 2 continues the introduction given in volume 1 with the more advanced texts about the foundations of image formation. Emphasis is placed on an intuitive while theoretically exact presentation. More than 400 color graphs and selected references on the end of each chapter support this undertaking. From the contents: 17 Wave equation 18 Diffraction 19 Interference and coherence 20 Imaging 21 Imaging with partial coherence 22 Three dimensional imaging 23 Polarization 24 Polarization and optical imaging A1 Mathematical appendix Other Volumes Volume 1: Fundamentals of Technical Optics Volume 3: Aberration Theory and Correction of Optical Systems Volume 4: Survey of Optical Instruments Volume 5: Advanced Physical Optics

Optical MetrologyOptical Metrology



The first three chapters of the book cover classical optical phenomena of wave propagation, interference, diffraction and polarization, with simple explanations of coherence, imaging, and optical filtering.

Author: Kjell J. Gåsvik

Publisher:

ISBN: UVA:X001400729

Category:

Page: 231

View: 943

Covers the four optical metrology techniques of holographic interferometry, moire techniques, speckle methods and photoelasticity in a single volume.

Handbook of VLSI MicrolithographyHandbook of VLSI Microlithography



This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings-- including optical lithography, electron beam, ...

Author: William B. Glendinning

Publisher: William Andrew

ISBN: 9781437728224

Category:

Page: 671

View: 934

This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings-- including optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line edge and pattern feature dimension control. The book's explanation of resist and resist process equipment technology may well be the first practical description of the relationship between the resist process and equipment parameters. The basics of resist technology are completely covered -- including an entire chapter on resist process defectivity and the potential yield limiting effect on device production. Each alternative lithographic technique and testing method is considered and evaluated: basic metrology including optical, scanning-electron-microscope (SEM) techniques and electrical test devices, along with explanations of actual printing tools and their design, construction and performance. The editor devotes an entire chapter to today's sophisticated, complex electron-beam printers, and to the emerging x-ray printing technology now used in high-density CMOS devices. Energetic ion particle printing is a controllable, steerable technology that does not rely on resist, and occupies a final section of the handbook.

Handbook of Critical Dimension Metrology and Process ControlHandbook of Critical Dimension Metrology and Process Control



These issues have not only motivated significant recent progress in optical
metrology , but also have raised many questions , speculations , and predictions
about the quality and value of optical submicrometer dimensional measurements
of ...

Author: Kevin M. Monahan

Publisher: Society of Photo Optical

ISBN: UCSD:31822018832626

Category:

Page: 358

View: 907

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

Development of a Six Degree of freedom Laser Measurement System for Machine Geometric Error MeasurementDevelopment of a Six Degree of freedom Laser Measurement System for Machine Geometric Error Measurement



Farage , F. T. , and M. A. Curtis , ed . , Handbook of Dimensional Measurement ,
3rd ed . , 269 , Industrial Press ( 1994 ) . Feldman , A. , D. Horowitz , R. M. Waxler
, and M. J. Dodge , Optical Material Characterization , Natl . Bur . Stand .

Author: Jian He

Publisher:

ISBN: UOM:39015041794242

Category:

Page:

View: 107

Optical MetrologyOptical Metrology



Critical Reviews Series : Recent Titles Optical Metrology ( CR72 , G . A . Al -
Jumaily ) Wavelength Division ... J . C . Wiltse ) Glass Integrated Optics and
Optical Fiber Devices ( CR53 , S . I . Najafi ) Handbook of Critical Dimension
Metrology ...

Author: Ghanim A. Al-Jumaily

Publisher: Society of Photo Optical

ISBN: STANFORD:36105111993585

Category:

Page: 276

View: 548

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

Process Instruments and Controls HandbookProcess Instruments and Controls Handbook



Dimensional metrology is concerned with the measurement of length , distance ,
thickness , and angle and their ... The topic is closely related to the material in the
preceding article of this Handbook , Position , Displacement , Motion ... The optics
of an interferometer are designed so that the variance of known wavelengths and
path lengths within the instrument permits accurate measurement of distances .

Author: Douglas M. Considine

Publisher: McGraw-Hill Companies

ISBN: UOM:39015009809594

Category:

Page: 1766

View: 175

A major revision of a best-selling guide covers the design and operation of measurement and automatic control systems used in such industries as chemical, petroleum, petrochemical, food, pulp and paper, textile, water and wastes, metallurgical and product manufacturing. Reflects new developments in manufacturing industries and in associated research and quality control laboratories.

Three dimensional Video and DisplayThree dimensional Video and Display



Optics in Agriculture : 1990 - 2000 ( CR80 , J . A . De Shazer , G . E . Meyer )
Intellectual Property Issues Facing High - Tech ... Glass Integrated Optics and
Optical Fiber Devices ( CR53 , S . I . Najafi ) Handbook of Critical Dimension
Metrology ...

Author: Bahram Javidi

Publisher: Society of Photo Optical

ISBN: UOM:39015056323499

Category:

Page: 350

View: 727

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

Handbook of Plastic OpticsHandbook of Plastic Optics



Before starting the actual review of various metrology technologies , Table 4 . ...
Metrology should be able to characterize optical components to at least these
levels . ... 2 Dimensional Metrology Good optics always needs good mechanics .

Author: Stefan Bäumer

Publisher: Wiley-VCH Verlag GmbH

ISBN: UOM:39015060836486

Category:

Page: 189

View: 815

This volume is the only book to describe in detail all aspects of plastic optics from design issues to production technology and quality control aspects. Throughout, the focus is firmly set on practical applications, making this an indispensable source of information for all those working in optics research and development. Topics covered in this volume include: Opto-mechanical design Processing Tooling Materials Metrology Equipment Applications