Bringing Scanning Probe Microscopy up to SpeedBringing Scanning Probe Microscopy up to Speed



The scanning probes with film actuators are fast enough to provide Zoom and pan imaging capabilities. The instruments have the feel on the SEM with improved spatial resolution. The increase in scanning speed, together with the increase ...

Author: Stephen C. Minne

Publisher: Springer Science & Business Media

ISBN: 9781461551676

Category:

Page: 159

View: 759

Bringing Scanning Probe Microscopy Up to Speed introduces the principles of scanning probe systems with particular emphasis on techniques for increasing speed. The authors include useful information on the characteristics and limitations of current state-of-the-art machines as well as the properties of the systems that will follow in the future. The basic approach is two-fold. First, fast scanning systems for single probes are treated and, second, systems with multiple probes operating in parallel are presented. The key components of the SPM are the mechanical microcantilever with integrated tip and the systems used to measure its deflection. In essence, the entire apparatus is devoted to moving the tip over a surface with a well-controlled force. The mechanical response of the actuator that governs the force is of the utmost importance since it determines the scanning speed. The mechanical response relates directly to the size of the actuator; smaller is faster. Traditional scanning probe microscopes rely on piezoelectric tubes of centimeter size to move the probe. In future scanning probe systems, the large actuators will be replaced with cantilevers where the actuators are integrated on the beam. These will be combined in arrays of multiple cantilevers with MEMS as the key technology for the fabrication process.

Bringing Scanning Probe Microscopy up to SpeedBringing Scanning Probe Microscopy up to Speed



Bringing Scanning Probe Microscopy Up to Speed introduces the principles of scanning probe systems with particular emphasis on techniques for increasing speed.

Author: Stephen C. Minne

Publisher: Springer Science & Business Media

ISBN: 0792384660

Category:

Page: 180

View: 275

Bringing Scanning Probe Microscopy Up to Speed introduces the principles of scanning probe systems with particular emphasis on techniques for increasing speed. The authors include useful information on the characteristics and limitations of current state-of-the-art machines as well as the properties of the systems that will follow in the future. The basic approach is two-fold. First, fast scanning systems for single probes are treated and, second, systems with multiple probes operating in parallel are presented. The key components of the SPM are the mechanical microcantilever with integrated tip and the systems used to measure its deflection. In essence, the entire apparatus is devoted to moving the tip over a surface with a well-controlled force. The mechanical response of the actuator that governs the force is of the utmost importance since it determines the scanning speed. The mechanical response relates directly to the size of the actuator; smaller is faster. Traditional scanning probe microscopes rely on piezoelectric tubes of centimeter size to move the probe. In future scanning probe systems, the large actuators will be replaced with cantilevers where the actuators are integrated on the beam. These will be combined in arrays of multiple cantilevers with MEMS as the key technology for the fabrication process.

Applied Scanning Probe Methods VApplied Scanning Probe Methods V



Scanning Probe Microscopy Techniques Bharat Bhushan, Harald Fuchs, Satoshi Kawata. 1.6 Outlook Future integrated AFMs will feature different ... Quate CF (1999) Bringing Scanning Probe Microscopy up to Speed. Kluwer Academic, Boston 4.

Author: Bharat Bhushan

Publisher: Springer Science & Business Media

ISBN: 9783540373162

Category:

Page: 344

View: 789

The volumes V, VI and VII will examine the physical and technical foundation for recent progress in applied scanning probe techniques. These volumes constitute a timely comprehensive overview of SPM applications. This is the first book summarizing the state-of-the-art of this technique. The chapters are written by leading researchers and application scientists from all over the world and from various industries to provide a broader perspective.

Scanning Probe LithographyScanning Probe Lithography



... ISBN 0-7923-8306-0, October 1998 Microcantilevers for Atomic Force Microscope Data Storage Benjamin W. Chui Hardbound, ISBN 0-7923-8358-3, October 1998 Bringing Scanning Probe Microscopy Up to Speed Stephen C. Minne, ...

Author: Hyongsok T. Soh

Publisher: Springer Science & Business Media

ISBN: 9781475733310

Category:

Page: 197

View: 317

Scanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer-scale features on the sample. SPL is capable of patterning sub-30nm features with nanometer-scale alignment registration. It is a relatively simple, inexpensive, reliable method for patterning nanometer-scale features on various substrates. It has potential applications for nanometer-scale research, for maskless semiconductor lithography, and for photomask patterning. The authors of this book have been key players in this exciting new field. Calvin Quate has been involved since the beginning in the early 1980s and leads the research time that is regarded as the foremost group in this field. Hyongsok Tom Soh and Kathryn Wilder Guarini have been the members of this group who, in the last few years, have brought about remarkable series of advances in SPM lithography. Some of these advances have been in the control of the tip which has allowed the scanning speed to be increased from mum/second to mm/second. Both non-contact and in-contact writing have been demonstrated as has controlled writing of sub-100 nm lines over large steps on the substrate surface. The engineering of a custom-designed MOSFET built into each microcantilever for individual current control is another notable achievement. Micromachined arrays of probes each with individual control have been demonstrated. One of the most intriguing new aspects is the use of directly-grown carbon nanotubes as robust, high-resolution emitters. In this book the authors concisely and authoritatively describe the historical context, the relevant inventions, and the prospects for eventual manufacturing use of this exciting new technology.

Atomic Force Microscopy for BiologistsAtomic Force Microscopy for Biologists



Meyer, E., Hug, H.J., Bennewitz R. (2003) Scanning Probe Microscopy: The Lab on a Tip. Springer-Verlag. Minne, S.C. et al. (1999). Bringing scanning probe microscopy up to speed. Kluwer Academic Publishers. Morita, S., Wiesendanger, R., ...

Author: Victor J Morris

Publisher: World Scientific

ISBN: 9781908978219

Category:

Page: 420

View: 847

Atomic force microscopy (AFM) is part of a range of emerging microscopic methods for biologists which offer the magnification range of both the light and electron microscope, but allow imaging under the "natural" conditions usually associated with the light microscope. To biologists, AFM offers the prospect of high resolution images of biological material, images of molecules and their interactions even under physiological conditions, and the study of molecular processes in living systems. This book provides a realistic appreciation of the advantages and limitations of the technique and the present and future potential for improving the understanding of biological systems. The second edition of this bestseller has been updated to describe the latest developments in this exciting field, including a brand new chapter on force spectroscopy. The dramatic developments of AFM over the past ten years from a simple imaging tool to the multi-faceted, nano-manipulating technique that it is today are conveyed in a lively and informative narrative, which provides essential reading for students and experienced researchers alike. Contents:ApparatusBasic PrinciplesMacromoleculesInterfacial SystemsOrdered MacromoleculesCells, Tissue and BiomineralsOther Probe MicroscopesForce Spectroscopy Readership: Undergraduates, postgraduates and researchers in biophysics. Keywords:AFM;Scanning Probe Microscopy (SPM);Biophysics;Cells;Macromolecules;Imaging;Biopolymers;Interfaces;DNA;PhospholipidsKey Features:Over 70 new pages, 700 new references, bringing it bang up-to-date with current literature, and 24 new figuresOnly book covering published research, machines and methodology from inception to the present day (2009)Updated to include and an entirely new chapter on force spectroscopyReviews:“This second edition of an excellent book updates considerably the information contained, and is expanded, too. The main focus of this book are the biological applications of AFM, and these are covered very well … The chapters are in-depth and very informative, and contain lots of useful and detailed information. In general the book is well written with an informal style, and contains useful information for beginners, including detailed information on how to carry out some experiments, answers to common questions, etc. … Overall this book is highly recommended for those wishing to get an overview of the biological applications of AFM.”Peter Eaton University of Porto, Portugal Reviews of the First Edition “This book fills an important niche by providing an introduction to AFM that will be understandable to a wide range of scientists … the reader is offered an introduction of sufficient brevity to actually be read and of sufficient depth to help in defining the potential uses of SPMs in his or her own research.” Scott Fraser (California Institute of Technology, USA) Nature Cell Biology “I found this book easy to read with clear, simple explanations of a complex topic. I think that the selection of the subjects treated in the book is sufficient for the non-specialist to understand both the basic concepts of the AFM and the production of AFM images in biological systems.”Microscopy and Analysis “… is an excellent introduction for anybody wishing to enter this field … In summary I would strongly recommend this book to any biologist planning on carrying out research using SPM imaging techniques and existing users in the field who wish to broaden their knowledge of SPM imaging and the research already carried out on common biological systems.”Drew Murray JPK Instruments, Berlin “This book provides an excellent survey of novel applications. It is nicely illustrated with numerous images from leading experts in the field. Clear descriptions of the apparatus and its basic principles are provided in a way accessible to students/scientists who do not have a strong physics background. It will be useful to biologists, but also non-biologists dealing with biosystems …”Prof Y F Dufrêne UCL, Belgium

NanoscienceNanoscience



... Watanabe, Y. (Eds.): Advances in Scanning Probe Microscopy (Advances in Materials Research, 2), Springer-Verlag (2000) Minne, S.C., Manalis, S.R., Quate, C.F.: Bringing Scanning Probe Microscopy up to Speed [Microsystems (Series), ...

Author: Claire Dupas

Publisher: Springer Science & Business Media

ISBN: 9783540286172

Category:

Page: 823

View: 231

This practically-oriented overview of nanotechnologies and nanosciences is designed to provide students and researchers with essential information on both the tools of manufacture and specific features of the nanometric scale. Specific applications and techniques covered include nanolithography, STM and AFM, nanowires and supramolecules, molecular electronics, pptronics, and simulation. Each section devotes space to industrial applications and prospective developments. The book provides the only pedagogical review on major nanosciences topics at this level.

Applied Scanning Probe Methods VIIApplied Scanning Probe Methods VII



... Ryu K, Fan Z, Mirkin C, Liu C (2003) in: 16th IEEE international micro electro mechanical systems conference, MEMS 2003, Kyoto, Japan Minne SC, Manalis SR, Quate Calvin F (1999) Bringing scanning probe microscopy up to speed.

Author: Bharat Bhushan

Publisher: Springer Science & Business Media

ISBN: 9783540373216

Category:

Page: 380

View: 340

The first volume in the series was released in January 2004 and the second to fourth volumes in early 2006. The field is now progressing so fast that there is a need for one volume every 12 to 18 months to capture latest developments. Volume VII presents 9 chapters on a variety of new and emerging techniques and refinements of SPM applications.

The PolysiloxanesThe Polysiloxanes



Bae, S.C.; Lee, H.; Lin, Z.; Granick, S., Chemical Imaging in a Surface Forces Apparatus: Confocal Raman Spectroscopy of Confined ... Minne, S. C.; Manalis, S. R.; Quate, C. F., Bringing Scanning Probe Microscopy up to Speed.

Author: James E. Mark

Publisher: Oxford University Press

ISBN: 9780190266455

Category:

Page: 296

View: 183

Polysiloxanes are the most studied inorganic and semi-inorganic polymers because of their many medical and commercial uses. The Si-O backbone endows polysiloxanes with intriguing properties: the strength of the Si-O bond imparts considerable thermal stability, and the nature of the bonding imparts low surface free energy. Prostheses, artificial organs, objects for facial reconstruction, vitreous substitutes in the eyes, and tubing take advantage of the stability and pliability of polysiloxanes. Artificial skin, contact lenses, and drug delivery systems utilize their high permeability. Such biomedical applications have led to biocompatibility studies on the interactions of polysiloxanes with proteins, and there has been interest in modifying these materials to improve their suitability for general biomedical application. Polysiloxanes examines novel aspects of polysiloxane science and engineering, including properties, work in progress, and important unsolved problems. The volume, with ten comprehensive chapters, examines the history, preparation and analysis, synthesis, characterization, and applications of these polymeric materials.

CMOS Cantilever Sensor SystemsCMOS Cantilever Sensor Systems



Atomic Force Microscopy and Gas Sensing Applications D. Lange, O. Brand, H. Baltes ... S.C. Minne, S.R. Manalis, C.F. Quate, Bringing Scanning Probe Microscopy up to Speed, Kluwer Academic Publishers, Boston, 1999.

Author: D. Lange

Publisher: Springer Science & Business Media

ISBN: 9783662050606

Category:

Page: 142

View: 251

This book is intended for scientists and engineers in the field of micro- and nano electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype. It is also a useful resource for researchers on cantilever sensors and resonant sensors in general The reader will become familiar with the potential of the combination of two technological approaches: IC fabrication technology, notably CMOS technology, and silicon micromachining and the resulting microstructures such as cantilever beams. It was recognized early that these two technologies should be merged in order to make the microstructures smart and devise integrated microsystems with on-chip driving and signal conditioning circuitry - now known as CMOS MEMS or, with the arrival of nanostructures, CMOS NEMS. One way to achieve the merger is the post-processing micro- or nano- machining of finished CMOS wafers, some of which is described in this book. The book introduces this approach based on work carried out at the Physical Electronics Laboratory of ETH Zurich on arrays of cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of phys ical quantities such as forces and mass changes. The book is divided into three parts. First, general aspects of cantilever resona tors are introduced, e. g. their resonant behavior and possible driving and sensing mechanisms.

Heat Convection in Micro DuctsHeat Convection in Micro Ducts



THE KLUWER INTERNATIONAL SERIES IN MICROSYSTEMS Consulting Editor: Stephen Senturia Massachusetts Institute of Technology Volumes ... Oliver Brand ISBN 0 - 7.923 - 8508-X Bringing Scanning Probe Microscopy Up to Speed Stephen C. Minne, ...

Author: Yitshak Zohar

Publisher: Springer Science & Business Media

ISBN: 9781475736076

Category:

Page: 202

View: 488

As the field of Microsystems expands into more disciplines and new applications such as RF-MEMS, Optical MEMS and Bio-MEMS, thermal management is becoming a critical issue in the operation of many microdevices, including microelectronic chips. Heat Convection in Micro Ducts focuses on the fundamental physics of convective heat transfer in microscale and specific applications such as: microchannel heat sinks, micro heat pipes, microcoolers and micro capillary pumped loops. This book will be of interest to the professional engineer and graduate student interested in learning about heat removal and temperature control in advanced integrated circuits and microelectromechanical systems.